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diffraction limit To counter this scaling problem, one must either increase lens complexity or reduce the eld of view when scaling to larger optical systems In considering these scaling issues, Lohmann presents an empirical observation stating that the effective f/# tends to increase as f 1=3 , where f is the focal length in millimeters [157] Under this rule, reasonable design for an f/1 system at 1 mm is reduced to f/3 at 1 cm aperture and f/10 at 1 m aperture The alternate strategy of increasing system complexity is adopted to the maximum extent in microlithographic systems The development of microlithography is driven by Moore s law, which predicts that the number of transistors per integrated circuit should double every 2 years Moore s law has been satis ed over many years by increasing circuit area and by decreasing lithographic feature sizes Figure 10.

- 1)

an existing text style, a font, or a font size. Close the editor to place the leader. Notice that the command adds a short horizontal landing line that connects a diagonal arrow to the text. When you start the MLEADER command, you have the following options at the first prompt: n leader Landing first. Lets you first specify the point where the line meets the text. If you choose this option, AutoCAD continues to prompt you for the leader landing first. n Content first. Lets you specify a location for the text label, and then enter the text. n Options. Displays the following suboptions: n Leader type. Offers you options relating to the leader. You can use the Type suboption to choose a straight line (the default), a spline, or no line at all. Choose the Landing suboption to choose whether or not you want a landing, and if so, its length. n leader lAnding. Lets you choose whether you want a landing (Yes) or not (No). n Content type. Lets you choose whether you want the leader to end with Mtext (the default), a block, or nothing. If you choose the Block suboption, you enter the name of the block. (Blocks are covered in 18.) n Maxpoints. Lets you specify the maximum number of points of the line. A three-point line will have three vertices. n First angle. Lets you enter an angle to constrain the first angle after the arrowhead segment. For example, you could constrain the angle to 90 . n Second angle. If you specified more than two points, you can constrain a second angle. n eXit options. Exits the Options prompts and returns you to the main prompts for the MLEADER command.

25 plots the normalized information capacity of state-of-the-art lithographic lens systems since the early 1980s The normalized information capacity is a measure of the degrees of freedom encoded by the system [176] The upper curve is Moore s law, doubling system performance every 2 years; the lower curves show the information capacity actually achieved TTIwave is the total transmitted information relative to the 1980 baseline based on optical improvements alone TTIk1 is the improvement incorporating nonlinear processing strategies in photoresist and exposure TTItool is the improvement incorporating system factors in the integrated lithographic tool The break between the tool and k1 curves is due to the implementation of spatially scanned exposure strategies in 1995, effectively corresponding to the introduction of multiaperture lithography Factors driving improvements in lithographic tools are illustrated in Fig 1026 Reduction in the wavelength from .

n Anti-Aliased. Use this option to smooth edges of text, line art, and images that are interpolated through resampling. If you disable this option, text appears with jagged edges. Text in PDF files rasterized in Photoshop looks best when anti-aliased and when the display is more consistent with the original font used when the PDF was created. n Suppress warnings. Check this box to open the files without your having to respond to any warning dialog boxes that might report problems with the pages. One problem you may encounter when rasterizing PDF documents in Photoshop is maintaining font integrity. Photoshop displays a warning dialog box when it encounters a font that is not installed on your system, which presents problems when you attempt to rasterize the font. If such a problem exists, the font can be eliminated from the document or changed after you open the file in Photoshop and edit the type layer.